Mechanical and thermophysical properties of PECVD oxynitride films measured by mems (2001)
Guimarães, Marcelo Silva; Sinatora, Amilton 
; Aloyo, M. I.; Pereyra, Inés ; Páez Carreño, Marcelo Nelson
Source: Thin Solid Films. Unidade: EP
Subjects: MATERIAIS (PROPRIEDADES MECÂNICAS), MATERIAIS (PROPRIEDADES PLÁSTICAS), ÓXIDO NÍTRICO
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GUIMARÃES, Marcelo Silva et al. Mechanical and thermophysical properties of PECVD oxynitride films measured by mems. Thin Solid Films, v. no 2001, p. 626-631, 2001Tradução . . Disponível em: https://doi.org/10.1016/s0040-6090(01)01329-3. Acesso em: 01 maio 2024.APA
Guimarães, M. S., Sinatora, A., Aloyo, M. I., Pereyra, I., & Páez Carreño, M. N. (2001). Mechanical and thermophysical properties of PECVD oxynitride films measured by mems. Thin Solid Films, no 2001, 626-631. doi:10.1016/s0040-6090(01)01329-3NLM
Guimarães MS, Sinatora A, Aloyo MI, Pereyra I, Páez Carreño MN. Mechanical and thermophysical properties of PECVD oxynitride films measured by mems [Internet]. Thin Solid Films. 2001 ; no 2001 626-631.[citado 2024 maio 01 ] Available from: https://doi.org/10.1016/s0040-6090(01)01329-3Vancouver
Guimarães MS, Sinatora A, Aloyo MI, Pereyra I, Páez Carreño MN. Mechanical and thermophysical properties of PECVD oxynitride films measured by mems [Internet]. Thin Solid Films. 2001 ; no 2001 626-631.[citado 2024 maio 01 ] Available from: https://doi.org/10.1016/s0040-6090(01)01329-3
